Lithography Machine Mask Aligner Photo-Etching Machine
Folasaga o oloa
O le fa'aaliga fa'apogai malamalama fa'aaogaina fa'aulufale mai UV LED ma fa'apogai fa'apogai fa'apogai, fa'atasi ai ma sina vevela ma lelei fa'amautu malamalama.
O le faʻaogaina o moli faʻasolosolo e lelei le faʻafefe o le vevela ma le faʻamalamalamaina o le puna malamalama, ma o le sui o le moli mercury ma le tausiga e faigofie ma faigofie.Fa'aauupegaina i luga ole fa'amatagofieina binocular lua fanua microscope ma 21 inisi lautele lau LCD, e mafai ona fa'aogaina va'ai e ala i
mata mata poʻo le CCD + faʻaalia, faʻatasi ai ma le maualuga o le faʻaogaina o le saʻo, faʻaogaina faʻaogaina ma le faʻaogaina faigofie.
Vaega
Fa'atasi ai ma galuega fa'atino vaega
O le fa'asa'oina o le mamafa o feso'ota'iga e fa'amautinoa ai le toe fa'afo'i mai e ala i le fa'alogo
E mafai ona seti fa'atekinolosi le va o le fa'aogaina ma le va fa'aalia
Fa'aaogāina komipiuta fa'apipi'i + fa'agaioia mata, faigofie ma faigofie, matagofie ma agalelei
Toso ituaiga i luga ma lalo ipu, faigofie ma faigofie
Lagolago le fa'afeso'ota'i masini, fa'afeso'ota'i faigata, fa'afeso'ota'i fa'amalosi ma fa'alatalata
Fa'atasi ai ma galuega fa'aoga nano fa'ailoga
Fa'aaliga fa'afuafua tasi ma le ki e tasi, maualuga maualuga o le masini
O lenei masini o loʻo i ai le faʻatuatuaina lelei ma le faʻataʻitaʻiga talafeagai, aemaise lava mo aʻoaʻoga, suʻesuʻega faasaienisi ma faleoloa i Kolisi ma iunivesite
Fa'amatalaga atili
Fa'amatalaga
1. Va'aiga Fa'aaliga: 110mm × 110mm;
2. ★ Faʻaalia le umi o le galu: 365nm;
3. I'uga: ≤ 1m;
4. Fa'atonu sa'o: 0.8m;
5. O le tele o gaioiga o le laulau faʻataʻitaʻiga o le faiga faʻaogaina e tatau ona sili atu ona fetaui: Y: 10mm;
6. O le agavale ma le taumatau moli paipa o le alignment faiga e mafai ona gaoioi eseese i X, y ma Z faatonuga, X itu: ± 5mm, Y itu: ± 5mm ma Z itu: ± 5mm;
7. Lapo'a ufimata: 2.5 inisi, 3 inisi, 4 inisi, 5 inisi;
8. Fa'ata'ita'iga tele: fragment, 2 ", 3", 4 ";
9. ★ E talafeagai mo faʻataʻitaʻiga mafiafia: 0.5-6mm, ma e mafai ona lagolagoina 20mm vaega faʻataʻitaʻiga i le tele (faʻapitoa);
10. Fa'aaliga fa'aalia: taimi (tulaga faitau i lalo);
11. Le tutusa o moli: ＜ 2.5%;
12. Lua fa'afanua CCD alignment microscope: mata tioata (1-5 taimi) + tioata fa'amoemoe ole microscope;
13. O le fa'agaioiga o le ufimata e fa'atatau i le fa'ata'ita'iga e tatau ona fetaui ma: X: 5mm;Y: 5mm;:6º；
14. ★ Fa'aaliga malosi malosi: > 30MW / cm2,
15. ★ O le tulaga alignment ma le tulaga faʻaalia o loʻo galue i nofoaga e lua, ma o le lua servo afi afi otometi;
16. Fa'asa'o fa'asagaga fa'afeso'ota'i fa'amautinoa le toe fa'afo'i mai e ala i le fa'alogo;
17. ★ O le alignment gap ma le avanoa e mafai ona seti numera;
18. ★ O loʻo i ai le nano imprint interface ma le vavalalata vavalalata;
19. ★ Fa'agaioiga mata pa'i;
20. Aotelega fua: E uiga i 1400mm (umi) 900mm (lautele) 1500mm (maualuga).
